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Development of TiO2 Anatase Thin Films Grown by Pulsed DC Magnetron Reactive Sputtering for Device Applications

WSU researchers have developed a novel procedure for creating Titanium Dioxide (TiO2) thin films using anatase material. Procedure uses TiO2 thin film with single phase a textured material and reproducible with different thickness on amorphous and crystalline substrates. Anatase is attracting much interest for its unique properties and has valuable...

Published: 2/6/2014 | Inventor(s): Ibrahim AL-Houmoudi, Golam Newaz, Gregory Auner, Ratna Naik

Keywords(s): Anti Reflection, Sensors

Category(s): Chemicals, Materials, Thin films, Physical Sciences, Sensors, Industrial & Manufacturing, Other