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Volatile Thermally Stable Transition Metal Precursors for Thin Film Growth

Wayne State researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials by atomic layer deposition and chemical vapor deposition.Commercial Applications • Microelectronic devices o Automotive applications...

Published: 2/6/2014 | Inventor(s): Charles Winter, Mahesh Karunrathne

Keywords(s): Batteries, Coatings, Electronics

Category(s): Materials, Chemicals, Other, Physical Sciences, Thin films